Isel Wafer Handling Robot, Logosol Pre Aligner – 2023

Repeatability T ±0.02° R ±0.02 mm Z ±0.02 mm Working Range: Z 10″ Radial: 10″ Theta: 500° Payload: up to 3 kg Maximum Speed: T 360°/s R 1,000 mm/s Z 450 mm/s Power supply: 115 – 230 VAC 50 – 60 Hz 500 VA (standard) 550 VA (advanced) Main Interface: RS-232 [DB9] Ethernet [RJ-45] Weight approx. 25 – 32 kg

All specifications are assumed to be correct but must be confirmed by the purchasing entity.,Equipped With: – 2x 4mm hoses compressed air (EEF1, 5 bar) – 1x 3,2mm tube vacuum (EEF2) – I/O ́s : +24V, GND, flu signal IN3, flu detection IN4, mapper OUT5, Mapper IN5, Gripper OUT9

All specifications are assumed to be correct but must be confirmed by the purchasing entity.,3 axis Prealigner, 3-8″ Vacuum, Peek chuck, 10KCPR Bottom entry LPA-38-3-V40P1-S23-B-V500P-NE Standalone

All specifications are assumed to be correct but must be confirmed by the purchasing entity.,Specs: Wafer Diameter 3″, 100mm, 125mm, 150mm, 200mm Wafer Opacity Transparent, Semi-Transparent, Opaque Square Substrates Applicable Wafer Handling Vacuum Chuck and Pins Centering Accuracy ±25um on the Prealigner Chuck Angular Accuracy (3 Sigma) 10000 CPR Encoder ±0.04° on the Prealigner Chuck 24000 CPR Encoder ±0.02° on the Prealigner Chuck Servo Axes Three Host Communication RS232, Ethernet Max Initial Wafer Offset 12mm Body Dimensions (W x L x H) 173mm x 267mm x 190mm Footprint Compatibility LPA26-3, LPA58-3 LPA4EH-3, LPA5EH-3, LPA6EH-3, LPA8EH-3 Weight 5.00kg Facilities Required 100-240VAC, 50/60Hz, 48VA, or 24VDC/2A Vacuum 12″ Hg Flat/Notch Compatibility SEMI Standards Compliant Cleanliness Class 1 MTBF More than 70000 hours

All specifications are assumed to be correct but must be confirmed by the purchasing entity.,*Standard wait time on new unit-50 weeks

All specifications are assumed to be correct but must be confirmed by the purchasing entity.,This unit is unused and available immediately

All specifications are assumed to be correct but must be confirmed by the purchasing entity.