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XYZ Travel (mm): 300 x 150 x 150
XYZ Scale Resolution: 0.1µm
Stage Drive System: DC Servo Motor X, Y, Z
X-Y Axis Velocity: 150mm/sec
Z-Axis Velocity: 100mm/sec
All specifications are assumed to be correct but must be confirmed by the purchasing entity.,Imaging Optics: Single magnification, fixed lens optics with factory configurable back tube and field interchangeable front lens Metrology Camera: (1) 2.0 Mega-Pixel Camera and associated electronics. Back Tube: View 1x Back Tube Standard Front Lens: VIEW 2.5X ; FOV (mm) 2.78 x 2.07 Illumination: Programmable LED illumination system for coaxial through the-lens surface light, below-the-stage backlight, and multicolor ring light with motorized incidence angle control Measurement Modes: High Speed Move And Measure (MAM) Power Requirements: Auto-switching power supply 100-120VAC or 200-240VAC; 50/60 Hz XY Area Accuracy: E2 : (1.8+6L/1000) µm Z Linear Accuracy: E1 : (2.0+5L/1000) µm All specifications are assumed to be correct but must be confirmed by the purchasing entity.,Equipped With: Multi-Function Joystick for Stage Control System Controller: Intel® processor based Microsoft® Windows® operating system and on-board networking and communication ports Controller Accessory Package: QVI multifunction handheld controller with 3 axis joystick and illumination controls VIEW Dual Mag Optics (DMO): System provides two optical paths for 1x and 4x magnification of the front objective. Magnification changes are instantaneous, with no moving parts, and no need to recalibrate. All specifications are assumed to be correct but must be confirmed by the purchasing entity. |
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